Custom ECR Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using Custom ECR hardware returned 10 records.

Number	Title
1	Deposition of Al₂O₃ by Using ECR-ALD for Organic Substrate Devices
2	Lanthanum-Oxide Thin Films Deposited by Plasma-Enhanced Atomic Layer Deposition
3	Al₂O₃/TiO₂ multilayer thin films grown by plasma enhanced atomic layer deposition for organic light-emitting diode passivation
4	Study on deposition of Al₂O₃ films by plasma-assisted atomic layer with different plasma sources
5	Characteristics of high-k dielectric ECR-ALD lanthanum hafnium oxide (LHO) films
6	PEALD of HfO₂ Thin Films: Precursor Tuning and a New Near-Ambient-Pressure XPS Approach to in Situ Examination of Thin-Film Surfaces Exposed to Reactive Gases
7	Atomic Layer Deposition of La₂O₃ Thin Films by Using an Electron Cyclotron Resonance Plasma Source
8	Analysis of dispersive interactions at polymer/TiAlN interfaces by means of dynamic force spectroscopy
9	Electron Cyclotron Resonance Plasma-Assisted Atomic Layer Deposition of Amorphous Al₂O₃ Thin Films
10	Electrical Properties of Al₂O₃ Films Grown by the Electron Cyclotron Resonance Plasma-Enhanced Atomic Layer Deposition (ECR-PEALD) and Thermal ALD Methods