ASM Eagle XP8 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using ASM Eagle XP8 hardware returned 6 records.

Number	Title
1	Combined PEALD Gate-Dielectric and In-Situ SiN Cap-Layer for Reduced V_th Shift and RDS-ON Dispersion of AlGaN/GaN HEMTs on 200 mm Si Wafer
2	Innovative scatterometry approach for self-aligned quadruple patterning (SAQP) process control
3	Designing high performance precursors for atomic layer deposition of silicon oxide
4	Effect of rapid thermal annealing on the mechanical stress and physico-chemical properties in plasma enhanced atomic layer deposited silicon nitride thin films
5	Combined plasma-enhanced-atomic-layer-deposition gate dielectric and in situ SiN cap layer for reduced threshold voltage shift and dynamic ON-resistance dispersion of AlGaN/GaN high electron mobility transistors on 200 mm Si substrates
6	Engineering high quality and conformal ultrathin SiN_x films by PEALD for downscaled and advanced CMOS nodes