Conduction Band Offset Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Conduction Band Offset returned 4 record(s).

Number	Title
1	Normally-off AlGaN/GaN-on-Si metal-insulator-semiconductor heterojunction field-effect transistor with nitrogen-incorporated silicon oxide gate insulator
2	Low-temperature plasma-enhanced atomic layer deposition of HfO₂/Al₂O₃ nanolaminate structure on Si
3	Al₂O₃/SiO₂ nanolaminate for a gate oxide in a GaN-based MOS device
4	Spectroscopic and electrical calculation of band alignment between atomic layer deposited SiO₂ and β-Ga₂O₃ (2̅01)