Polarization Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Polarization returned 7 record(s).

Number	Title
1	Back-End, CMOS-Compatible Ferroelectric Field-Effect Transistor for Synaptic Weights
2	Annealing behavior of ferroelectric Si-doped HfO₂ thin films
3	CeO₂ Doping of Hf_0.5Zr_0.5O₂ Thin Films for High Endurance Ferroelectric Memories
4	Origin of Ferroelectric Phase Stabilization via the Clamping Effect in Ferroelectric Hafnium Zirconium Oxide Thin Films
5	Ferroelectricity in hafnia controlled via surface electrochemical state
6	Thermal stability of antiferroelectric-like Al:HfO₂ thin films with TiN or Pt electrodes
7	Atomic layer deposition of ferroelectric Hf_0.5Zr_0.5O₂ on single-layer, CVD-grown graphene