Friction Coefficient Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Friction Coefficient returned 5 record(s).

Number	Title
1	Plasma-enhanced atomic layer deposition of titanium molybdenum nitride: Influence of RF bias and substrate structure
2	Plasma-enhanced atomic layer deposition of vanadium nitride
3	Tribological properties of thin films made by atomic layer deposition sliding against silicon
4	Effects of deposition temperature on the wear behavior and material properties of plasma enhanced atomic layer deposition (PEALD) titanium vanadium nitride thin films
5	Comparison of mechanical properties and composition of magnetron sputter and plasma enhanced atomic layer deposition aluminum nitride films