Remanent Polarization Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Remanent Polarization returned 5 record(s).

Number	Title
1	Sub-10-nm ferroelectric Gd-doped HfO2 layers
2	Ferroelectricity of HfxZr1-xO2 thin films fabricated by 300°C low temperature process with plasma-enhanced atomic layer deposition
3	The effects of layering in ferroelectric Si-doped HfO2 thin films
4	Influence of oxygen source on the ferroelectric properties of ALD grown Hf1-xZrxO2 films
5	Origin of Ferroelectric Phase Stabilization via the Clamping Effect in Ferroelectric Hafnium Zirconium Oxide Thin Films