Passivation Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Passivation returned 13 record(s).

NumberTitle
1Influence of the Oxidant on the Chemical and Field-Effect Passivation of Si by ALD Al2O3
2Temporal and spatial atomic layer deposition of Al-doped zinc oxide as a passivating conductive contact for silicon solar cells
3Passivation of organic light-emitting diodes with aluminum oxide thin films grown by plasma-enhanced atomic layer deposition
4Tube-type plasma-enhanced atomic layer deposition of aluminum oxide: Enabling record lab performance for the industry with demonstrated cell efficiencies >24%
5Silicon surface passivation by ultrathin Al2O3 films and Al2O3/SiNx stacks
6Role of field-effect on c-Si surface passivation by ultrathin (2-20 nm) atomic layer deposited Al2O3
7Surface passivation of phosphorus-diffused n+-type emitters by plasma-assisted atomic-layer deposited Al2O3
8Controlling the fixed charge and passivation properties of Si(100)/Al2O3 interfaces using ultrathin SiO2 interlayers synthesized by atomic layer deposition
9Al2O3/SiNx-Stacks at Increased Temperatures: Avoiding Blistering During Contact Firing
10Properties of atomic-layer-deposited ultra-thin AlN films on GaAs surfaces
11Advanced surface passivation of epitaxial boron emitters for high-efficiency ultrathin crystalline silicon solar cells
12Field-effect passivation of Si by ALD-Al2O3: Second harmonic generation monitoring and simulation
13Silicon surface passivation by ultrathin Al2O3 films synthesized by thermal and plasma atomic layer deposition