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Surface and sensing properties of PE-ALD SnO2 thin film

Type:
Journal
Info:
ELECTRONICS LETTERS 14th April 2005 Vol. 41 No. 8
Date:
2005-05-16
DOI:
http://dx.doi.org/10.1049/el:20058174

Author Information

Name Institution
Woonyoung LeeChonnam National University
Kwangjun HongChosun University
Yongju ParkChosun University
Nam-Hoon KimChosun University
Yongkook ChoiChonnam National University
Jin-Seong ParkChosun University

Films

Plasma SnO2

Hardware used: Unknown
DiButylTinDiAcetate, DBTDA, ((CH3CO2)2Sn[(CH2)3CH3]2)
CAS#: 1067-33-0
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature Range = 200-400C

Film/Plasma Properties

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: VG Scientific ESCALAB 250

Characteristic: Gas Sensing
Analysis: Custom
Diagnostic: HP 34401A

Substrates

SiO2

Notes

1262