Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Yongju Park Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Yongju Park returned 2 record(s).

NumberTitle
1Surface and sensing properties of PE-ALD SnO2 thin film
2Characteristics of Plasma-Enhanced Atomic-Layer Deposited (PEALD) SnO2 Thin Films