Al₂O₃ multi-density layer structure as a moisture permeation barrier deposited by radio frequency remote plasma atomic layer deposition

Type:

Journal

Info:

JOURNAL OF APPLIED PHYSICS 115, 073502 (2014)

Date:

2014-02-05

DOI:

http://dx.doi.org/10.1063/1.4866001

Author Information

Name	Institution
Hyunsoo Jung	Hanyang University

Hardware used: Custom

CAS#: 75-24-1

CAS#: 7782-44-7

Deposition Temperature = 100C

201