Hyunsoo Jung Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Hyunsoo Jung returned 3 record(s).

Number	Title
1	Al₂O₃ multi-density layer structure as a moisture permeation barrier deposited by radio frequency remote plasma atomic layer deposition
2	Radio frequency plasma power dependence of the moisture permeation barrier characteristics of Al₂O₃ films deposited by remote plasma atomic layer deposition
3	Moisture Barrier Properties of Al₂O₃ Films deposited by Remote Plasma Atomic Layer Deposition at Low Temperatures