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Chemical Protection of Polycarbonate Surfaces by Atomic Layer Deposition of Alumina with Oxygen Plasma Pretreatment

Type:
Journal
Info:
Adv. Mater. Interfaces 2016, 3, 1600340
Date:
2016-06-21

Author Information

Name Institution
Suk Won ParkKorea University
Kiho BaeKorea University
Jun Woo KimKorea University
Gyeong Beom LeeKorea University
Byoung-Ho ChoiKorea University
Min Hwan LeeUniversity of California - Merced
Joon Hyung ShimKorea University

Films

Other Al2O3

Hardware used: Unknown


CAS#: 7732-18-5

CAS#: 7782-44-7

Film/Plasma Properties

Substrates

Polycarbonate

Notes

922