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Amorphous alumina thin films deposited on titanium: Interfacial chemistry and thermal oxidation barrier properties

Type:
Journal
Info:
Physica Status Solidi (a)
Date:
2015-11-06
DOI:
http://dx.doi.org/10.1002/pssa.201532838

Author Information

Name Institution
Loïc BaggettoCentre Inter-universitaire de Recherche et d'Ingéniérie des Matériaux (CIRIMAT)
Cédric CharvillatCentre Inter-universitaire de Recherche et d'Ingéniérie des Matériaux (CIRIMAT)
Yannick ThébaultCentre Inter-universitaire de Recherche et d'Ingéniérie des Matériaux (CIRIMAT)
Jérôme EsvanCentre Inter-universitaire de Recherche et d'Ingéniérie des Matériaux (CIRIMAT)
Marie-Christine LafontCentre Inter-universitaire de Recherche et d'Ingéniérie des Matériaux (CIRIMAT)
Emmanuel ScheidLaboratoire d'Analyse et d'Architecture des Systèmes (LAAS)
Gabriel M. VeithOak Ridge National Laboratory
Constantin VahlasCentre Inter-universitaire de Recherche et d'Ingéniérie des Matériaux (CIRIMAT)

Films

Plasma Al2O3

Hardware used: Veeco - Ultratech - Cambridge NanoTech Fiji
TMA, Trimethylaluminum, Trimethylalumane, AlMe3, Al(CH3)3
CAS#: 75-24-1
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature = 300C

Film/Plasma Properties

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Diagnostic: Agilent 5500

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Diagnostic: Bruker D8 Advance

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: TEM, Transmission Electron Microscope
Diagnostic: JEOL 2100F

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: Electron Diffraction
Diagnostic: JEOL 2100F

Characteristic: Chemical Composition, Impurities
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy
Diagnostic: JEOL 2100F

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: Thermo Scientific K-Alpha

Characteristic: Thickness
Analysis: Optical Reflectivity
Diagnostic: Mikropack Nanocalc 2000

Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: JEOL JSM-7800F

Substrates

Silicon
Ti

Notes

424