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Method of Fabrication for Encapsulated Polarizing Resonant Gratings

Type:

Journal

Info:

IEEE Photonics Technology Letters, Volume:25, Issue:15, 2013

Date:

2013-06-12

DOI:

http://dx.doi.org/10.1109/LPT.2013.2266575

Author Information

Name	Institution
A. J. Pung	Clemson University
S. R. Carl	Clemson University
I. R. Srimathi	Clemson University
E. G. Johnson	Clemson University

Films

Plasma Al₂O₃

Hardware used: Oxford Instruments OpAL

TMA, Trimethylaluminum, Trimethylalumane, AlMe₃, Al(CH₃)₃

CAS#: 75-24-1

CAS#: 7782-44-7

Deposition Temperature Range N/A

Film/Plasma Properties

Substrates

SiO₂

Notes

572