The publication database currently has 1609 entries.
Search from:
202 Films Compositions
272 Precursors and Plasma Gases
76 Deposition Hardwares
249 Film and Plasma Characteristics
86 Theses
Use Multifactor Search for more complex searches and for searching by other criteria (author, affiliation, analysis, deposition temperature)
ALD Links
Contact Us
Advertising
Recent Database Additions
Growth of Gallium Nitride Films on Multilayer Graphene Template Using Plasma-Enhanced Atomic Layer Deposition
Ni80Fe20 nanotubes with optimized spintronic functionalities prepared by atomic layer deposition
On the Contact Optimization of ALD-Based MoS2 FETs: Correlation of Processing Conditions and Interface Chemistry with Device Electrical Performance
Search 1609 plasma ALD publications by:
Search 1609 plasma ALD publications by:
Role of Metal Contacts in Designing High-Performance Monolayer n-Type WSe2 Field Effect Transistors
Type:
Journal
Info:
Nano Lett., 2013, 13 (5), pp 1983-1990
Date:
2013-03-11
Author Information
| Name | Institution |
|---|---|
| Wei Liu | University of California - Santa Barbara (UCSB) |
| Jiahao Kang | University of California - Santa Barbara (UCSB) |
| Deblina Sarkar | University of California - Santa Barbara (UCSB) |
| Yasin Khatami | University of California - Santa Barbara (UCSB) |
| Debdeep Jena | University of Notre Dame |
| Kaustav Banerjee | University of California - Santa Barbara (UCSB) |
Films
Plasma Al2O3
Film/Plasma Properties
Substrates
| WSe2 |
Keywords
Notes
| 576 |