Publication Information

Title: Role of Metal Contacts in Designing High-Performance Monolayer n-Type WSe2 Field Effect Transistors

Type: Journal

Info: Nano Lett., 2013, 13 (5), pp 1983-1990

Date: 2013-03-11

DOI: http://dx.doi.org/10.1021/nl304777e

Author Information

Name

Institution

Wei Liu

University of California - Santa Barbara (UCSB)

Jiahao Kang

University of California - Santa Barbara (UCSB)

Deblina Sarkar

University of California - Santa Barbara (UCSB)

Yasin Khatami

University of California - Santa Barbara (UCSB)

Debdeep Jena

University of Notre Dame

Kaustav Banerjee

University of California - Santa Barbara (UCSB)

Films

Plasma Al2O3 using Oxford Instruments FlexAL

Deposition Temperature = 300C

TMA, Trimethyl Aluminum, Trimethylalane, Trimethylaluminium, Aluminium Trimethyl, Aluminum Trimethanide, Al(CH3)3, AlMe3, Al2(CH3)6, Al2Me6

75-24-1

Where to buy precursor

Oxygen, O2

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Substrates

WSe2

Keywords

Notes

576


Mark Sowa

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