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Low-temperature growth of gallium oxide thin films by plasma-enhanced atomic layer deposition
Low-temperature plasma-enhanced atomic layer deposition of 2-D MoS2: large area, thickness control and tuneable morphology
Microstructure and Interfaces of Ultra-Thin Epitaxial AlN Films Grown by Plasma-Enhanced Atomic Layer Deposition at Relatively Low Temperatures
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Role of Metal Contacts in Designing High-Performance Monolayer n-Type WSe2 Field Effect Transistors
Type:
Journal
Info:
Nano Lett., 2013, 13 (5), pp 1983-1990
Date:
2013-03-11
Author Information
| Name | Institution |
|---|---|
| Wei Liu | University of California - Santa Barbara (UCSB) |
| Jiahao Kang | University of California - Santa Barbara (UCSB) |
| Deblina Sarkar | University of California - Santa Barbara (UCSB) |
| Yasin Khatami | University of California - Santa Barbara (UCSB) |
| Debdeep Jena | University of Notre Dame |
| Kaustav Banerjee | University of California - Santa Barbara (UCSB) |
Films
Plasma Al2O3
Film/Plasma Properties
Substrates
| WSe2 |
Keywords
Notes
| 576 |