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Initial and steady-state Ru growth by atomic layer deposition studied by in situ Angle Resolved X-ray Photoelectron Spectroscopy
Innovative remote plasma source for atomic layer deposition for GaN devices
Influence of plasma species on the early-stage growth kinetics of epitaxial InN grown by plasma-enhanced atomic layer deposition
Optical in situ monitoring of plasma-enhanced atomic layer deposition process
The role of active species in the N2 and N2-H2 RF afterglows on selective surface nitriding of ALD-grown TiO2 films
Role of Metal Contacts in Designing High-Performance Monolayer n-Type WSe2 Field Effect Transistors
Type:
Journal
Info:
Nano Lett., 2013, 13 (5), pp 1983-1990
Date:
2013-03-11
Author Information
| Name | Institution |
|---|---|
| Wei Liu | University of California - Santa Barbara (UCSB) |
| Jiahao Kang | University of California - Santa Barbara (UCSB) |
| Deblina Sarkar | University of California - Santa Barbara (UCSB) |
| Yasin Khatami | University of California - Santa Barbara (UCSB) |
| Debdeep Jena | University of Notre Dame |
| Kaustav Banerjee | University of California - Santa Barbara (UCSB) |
Films
Plasma Al2O3
Film/Plasma Properties
Substrates
| WSe2 |
Keywords
Notes
| 576 |