Suman Datta Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Suman Datta returned 3 record(s).

Number	Title
1	Fermi level unpinning of GaSb (100) using plasma enhanced atomic layer deposition of Al₂O₃
2	High quality HfO₂/p-GaSb(001) metal-oxide-semiconductor capacitors with 0.8nm equivalent oxide thickness
3	Performance enhancement of InAsSb QW-MOSFETs with in-situ H₂ plasma cleaning for gate stack formation