Tian-Li Wu Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Tian-Li Wu returned 5 record(s).

Number	Title
1	Correlation of interface states/border traps and threshold voltage shift on AlGaN/GaN metal-insulator-semiconductor high-electron-mobility transistors
2	Impact of gate insulator on the dc and dynamic performance of AlGaN/GaN MIS-HEMTs
3	Trapping and reliability issues in GaN-based MIS HEMTs with partially recessed gate
4	Toward Understanding Positive Bias Temperature Instability in Fully Recessed-Gate GaN MISFETs
5	Combined PEALD Gate-Dielectric and In-Situ SiN Cap-Layer for Reduced Vth Shift and RDS-ON Dispersion of AlGaN/GaN HEMTs on 200 mm Si Wafer