Shui-Yang Lien Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Shui-Yang Lien returned 7 record(s).

Number	Title
1	Chemical Reaction and Ion Bombardment Effects of Plasma Radicals on Optoelectrical Properties of SnO₂ Thin Films via Atomic Layer Deposition
2	Effect of plasma power on the structural properties of tin oxide prepared by plasma-enhanced atomic layer deposition
3	Deposition and Characterization of RP-ALD SiO₂ Thin Films with Different Oxygen Plasma Powers
4	Simulation and Fabrication of HfO₂ Thin Films Passivating Si from a Numerical Computer and Remote Plasma ALD
5	Influence of plasma power on deposition mechanism and structural properties of MoO_x thin films by plasma enhanced atomic layer deposition
6	Properties and Mechanism of PEALD-In₂O₃ Thin Films Prepared by Different Precursor Reaction Energy
7	Surface Passivation of Silicon Using HfO₂ Thin Films Deposited by Remote Plasma Atomic Layer Deposition System