Inductively coupled plasma sources from Plasma ALD, LLC.


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Andrey V. Miakonkikh Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Andrey V. Miakonkikh returned 6 record(s).

NumberTitle
1Micro-Raman Spectroscopy for Monitoring of Deposition Quality of High-k Stack Protective Layer onto Nanowire FET Chips for Highly Sensitive miRNA Detection
2Plasma Enhanced Atomic Layer Deposition of Ruthenium Films Using Ru(EtCp)2 Precursor
3Microstructure and electrical properties of thin HfO2 deposited by plasma-enhanced atomic layer deposition
4Properties of plasma enhanced atomic layer deposited ruthenium thin films from Ru(EtCp)2
5Application of spectral ellipsometry to in situ diagnostics of atomic layer deposition of dielectrics on silicon and AlGaN
6Comparative study of thermal and plasma enhanced atomic layer deposition of aluminum oxide on graphene