Xiaohui Tang Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Xiaohui Tang returned 4 record(s).

Number	Title
1	Damage evaluation in graphene underlying atomic layer deposition dielectrics
2	Passivation effects of atomic-layer-deposited aluminum oxide
3	Using top graphene layer as sacrificial protection during dielectric atomic layer deposition
4	Room temperature atomic layer deposition of Al2O3 and replication of butterfly wings for photovoltaic application