Xiaohui Tang Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Xiaohui Tang returned 4 record(s).

Number	Title
1	Room temperature atomic layer deposition of Al₂O₃ and replication of butterfly wings for photovoltaic application
2	Damage evaluation in graphene underlying atomic layer deposition dielectrics
3	Passivation effects of atomic-layer-deposited aluminum oxide
4	Using top graphene layer as sacrificial protection during dielectric atomic layer deposition