Marc Heyns Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Marc Heyns returned 5 record(s).

Number	Title
1	Graphene oxide monolayers as atomically thin seeding layers for atomic layer deposition of metal oxides
2	Low temperature deposition of 2D WS₂ layers from WF₆ and H₂S precursors: impact of reducing agents
3	Interfaces of high-k dielectrics on GaAs: Their common features and the relationship with Fermi level pinning
4	Nucleation mechanism during WS₂ plasma enhanced atomic layer deposition on amorphous Al₂O₃ and sapphire substrates
5	Plasma-Enhanced Atomic Layer Deposition of Two-Dimensional WS₂ from WF₆, H₂ Plasma, and H₂S