Dae-Young Moon Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Dae-Young Moon returned 6 record(s).

Number	Title
1	Enhancement of the Electrical Properties of Ga-doped ZnO Thin Films on Polycarbonate Substrates by Using a TiO2 Buffer Layer
2	Characteristics of high-k dielectric ECR-ALD lanthanum hafnium oxide (LHO) films
3	Atomic Layer Deposition of Copper Seed Layers from a (hfac)Cu(VTMOS) Precursor
4	Deposition of Al2O3 by Using ECR-ALD for Organic Substrate Devices
5	Plasma-enhanced atomic layer deposition of Cu–Mn films with formation of a MnSixOy barrier layer
6	Comparison of the Deposition Characteristics and Electrical Properties for La2O3, HfO2 and LHO Films