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Enhancement of the Electrical Properties of Ga-doped ZnO Thin Films on Polycarbonate Substrates by Using a TiO2 Buffer Layer

Type:
Journal
Info:
Journal of the Korean Physical Society, Vol. 51, No. 5, pp. 1732-1735
Date:
2007-07-07
DOI:
http://www.jkps.or.kr/journal/download_pdf.php?spage

Author Information

Name Institution
Yeon-Keon MoonHanyang University
Se Hyun KimHanyang University
Dae-Young MoonHanyang University
Woong-Sun KimHanyang University
Jong-Wan ParkHanyang University

Films

Plasma TiO2

Hardware used: Unknown
TDMATi, tetrakis(dimethylamido)titanium, titanium dimethylamide, (Me2N)4Ti
CAS#: 3275-24-9
O3, Ozone
CAS#: 10028-15-6
Deposition Temperature = 100C

Film/Plasma Properties

Characteristic: Thickness
Analysis: Profilometry
Diagnostic: Tencor Alpha-Step Profilometer

Characteristic: Thickness
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: Hitachi S-4300

Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: Hitachi S-4300

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Diagnostic: Bruker D8 Discover

Characteristic: Stress
Analysis: XRD, X-Ray Diffraction
Diagnostic: Bruker D8 Discover

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Diagnostic: AutoProbe AP0190

Characteristic: Resistivity, Sheet Resistance
Analysis: van der Pauw sheet resistance
Diagnostic: -

Substrates

Polycarbonate

Notes

1322