Woong-Sun Kim Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Woong-Sun Kim returned 6 record(s).

Number	Title
1	Atomic Layer Deposition of Copper Seed Layers from a (hfac)Cu(VTMOS) Precursor
2	Correlation of carbon content with the thermal stability of ruthenium deposited by using RF-direct plasma-enhanced atomic-layer deposition
3	Deposition of Al₂O₃ by Using ECR-ALD for Organic Substrate Devices
4	Comparison of the Deposition Characteristics and Electrical Properties for La₂O₃, HfO₂ and LHO Films
5	Enhancement of the Electrical Properties of Ga-doped ZnO Thin Films on Polycarbonate Substrates by Using a TiO₂ Buffer Layer
6	Characteristics of high-k dielectric ECR-ALD lanthanum hafnium oxide (LHO) films