Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Erin Cleveland Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Erin Cleveland returned 3 record(s).

NumberTitle
1Electronic properties of atomic-layer-deposited high-k dielectrics on GaSb(001) with hydrogen plasma pretreatment
2Spoof-like plasmonic behavior of plasma enhanced atomic layer deposition grown Ag thin films
3Atomic layer deposition of Al2O3 on GaSb using in situ hydrogen plasma exposure