Brent P. Gila Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Brent P. Gila returned 8 record(s).

Number	Title
1	Band alignment of atomic layer deposited SiO2 and HfSiO4 with $(\bar{2}01)$ β-Ga2O3
2	Band Offsets for Atomic Layer Deposited HfSiO₄ on (Al_0.14Ga_0.86)₂O₃
3	Band alignment of Al₂O₃ with (-201) β-Ga₂O₃
4	Effect of deposition conditions and composition on band offsets in atomic layer deposited HfxSi_1-xO_y on InGaZnO₄
5	Effect of Deposition Method on Valence Band Offsets of SiO₂ and Al₂O₃ on (Al_0.14Ga_0.86)₂O₃
6	Band alignment of atomic layer deposited SiO₂ on (010) (Al_0.14Ga_0.86)₂O₃
7	High breakdown voltage in AlN/GaN metal-insulator-semiconductor high-electron-mobility transistors
8	GaN metal-insulator-semiconductor high-electron-mobility transistor with plasma enhanced atomic layer deposited AlN as gate dielectric and passivation