M. G. Nolan Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by M. G. Nolan returned 5 record(s).

Number	Title
1	On the Trail Ancient Worlds: Comparative Study of Commercial Scandium and Yttrium Precursors, Asgard, Midgard, Vanaheim and Olympus
2	First principles mechanistic study of self-limiting oxidative adsorption of remote oxygen plasma during the atomic layer deposition of alumina
3	Reaction Mechanism of the Metal Precursor Pulse in Plasma-Enhanced Atomic Layer Deposition of Cobalt and the Role of Surface Facets
4	Structural and electrical analysis of the atomic layer deposition of HfO₂/n-In_0.53Ga_0.47As capacitors with and without an Al₂O₃ interface control layer
5	Reactions of ruthenium cyclopentadienyl precursor in the metal precursor pulse of Ru atomic layer deposition