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Gregory A. Ten Eyck Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Gregory A. Ten Eyck returned 3 record(s).

NumberTitle
1Plasma-Assisted Atomic Layer Deposition of Palladium
2Direct Plating of Cu on Pd Plasma Enhanced Atomic Layer Deposition Coated TaN Barrier
3Plasma-enhanced atomic layer deposition of palladium on a polymer substrate