Xinhe Zheng Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Xinhe Zheng returned 5 record(s).

Number	Title
1	PEALD-Grown Crystalline AlN Films on Si(100) with Sharp Interface and Good Uniformity
2	Metallic indium segregation control of InN thin films grown on Si(100) by plasma-enhanced atomic layer deposition
3	Plasma-enhanced atomic layer deposition of gallium nitride thin films on fluorine-doped tin oxide glass substrate for future photovoltaic application
4	Baking and plasma pretreatment of sapphire surfaces as a way to facilitate the epitaxial plasma-enhanced atomic layer deposition of GaN thin films
5	Growth of Gallium Nitride Films on Multilayer Graphene Template Using Plasma-Enhanced Atomic Layer Deposition