Virginia D. Wheeler Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Virginia D. Wheeler returned 6 record(s).

Number	Title
1	Role of plasma properties in controlling crystallinity and phase in oxide films grown by plasma-enhanced atomic layer epitaxy
2	The role of plasma in plasma-enhanced atomic layer deposition of crystalline films
3	Practical Challenges of Processing III-Nitride/Graphene/SiC Devices
4	Impact of Growth Conditions on the Phase Selectivity and Epitaxial Quality of TiO2 Films Grown by the Plasma-Assisted Atomic Layer Deposition
5	Phase Control of Crystalline Ga2O3 Films by Plasma-Enhanced Atomic Layer Deposition
6	ALD TiN Schottky Gates for Improved Electrical and Thermal Stability in III-N Devices