Kilian Devloo-Casier Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Kilian Devloo-Casier returned 4 record(s).

Number	Title
1	Low temperature plasma-enhanced atomic layer deposition of thin vanadium nitride layers for copper diffusion barriers
2	Controllable nitrogen doping in as deposited TiO₂ film and its effect on post deposition annealing
3	Independent tuning of size and coverage of supported Pt nanoparticles using atomic layer deposition
4	Plasma-enhanced atomic layer deposition: a gas-phase route to hydrophilic, glueable polytetrafluoroethylene