Chang-Yeh Lee Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Chang-Yeh Lee returned 3 record(s).

Number	Title
1	Thermal Stability of Novel Hole-Selective Contacts for Silicon Wafer Solar Cells
2	Evaluating the Impact of Thermal Annealing on Al₂O₃/c-Si Interface Properties by Non-Destructive Measurements
3	In situ x-ray photoelectron emission analysis of the thermal stability of atomic layer deposited WO_x as hole-selective contacts for Si solar cells