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Zi-Jun Ding Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Zi-Jun Ding returned 4 record(s).

NumberTitle
1Plasma-assisted atomic layer deposition and post-annealing enhancement of low resistivity and oxygen-free nickel nano-films using nickelocene and ammonia precursors
2Plasma-enhanced Atomic Layer Deposition of TaN Film and Its Resistance to Copper Diffusion
3Plasma-Enhanced Atomic Layer Deposition of Cobalt Films Using Co(EtCp)2 as a Metal Precursor
4Atomic layer deposition of amorphous Ni-Ta-N films for Cu diffusion barrier