DaShen Shen Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by DaShen Shen returned 3 record(s).

Number	Title
1	Effects of rapid thermal annealing on the properties of AlN films deposited by PEALD on AlGaN/GaN heterostructures
2	Low-temperature plasma-enhanced atomic layer deposition of HfO₂/Al₂O₃ nanolaminate structure on Si
3	Properties of HfLaO MOS capacitor deposited on SOI with plasma enhanced atomic layer deposition