Ganesh M. Sundaram Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Ganesh M. Sundaram returned 4 record(s).

Number	Title
1	Conformal Fe, Co and Ni Films from Oxides and Nitrides Grown by Atomic Layer Deposition
2	Process Control of Atomic Layer Deposition Molybdenum Oxide Nucleation and Sulfidation to Large-Area MoS₂ Monolayers
3	Plasma enhanced atomic layer deposition of molybdenum carbide and nitride with bis(tert-butylimido)bis(dimethylamido) molybdenum
4	Plasma-Enabled ALD of Niobium Nitride Using an Organometallic Nb Precursor