Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Zeger Hens Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Zeger Hens returned 3 record(s).

NumberTitle
1Plasma enhanced atomic layer deposition of aluminum sulfide thin films
2Plasma enhanced atomic layer deposition of zinc sulfide thin films
3Plasma enhanced atomic layer deposition of gallium sulfide thin films