Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Koen de Peuter Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Koen de Peuter returned 3 record(s).

NumberTitle
1Redeposition in plasma-assisted atomic layer deposition: Silicon nitride film quality ruled by the gas residence time
2Role of Surface Termination in Atomic Layer Deposition of Silicon Nitride
3Low-Temperature Plasma-Assisted Atomic Layer Deposition of Silicon Nitride Moisture Permeation Barrier Layers