Koen de Peuter Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Koen de Peuter returned 3 record(s).

Number	Title
1	Role of Surface Termination in Atomic Layer Deposition of Silicon Nitride
2	Redeposition in plasma-assisted atomic layer deposition: Silicon nitride film quality ruled by the gas residence time
3	Low-Temperature Plasma-Assisted Atomic Layer Deposition of Silicon Nitride Moisture Permeation Barrier Layers