David R. Boris Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by David R. Boris returned 7 record(s).

Number	Title
1	Role of plasma properties in controlling crystallinity and phase in oxide films grown by plasma-enhanced atomic layer epitaxy
2	Influence of plasma species on the early-stage growth kinetics of epitaxial InN grown by plasma-enhanced atomic layer deposition
3	Impact of Growth Conditions on the Phase Selectivity and Epitaxial Quality of TiO₂ Films Grown by the Plasma-Assisted Atomic Layer Deposition
4	Phase Control of Crystalline Ga₂O₃ Films by Plasma-Enhanced Atomic Layer Deposition
5	The role of plasma in plasma-enhanced atomic layer deposition of crystalline films
6	Effect of varying plasma properties on III-nitride film growth by plasma enhanced atomic layer epitaxy
7	Initial evaluation and comparison of plasma damage to atomic layer carbon materials using conventional and low T_e plasma sources