Saurabh Karwal Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Saurabh Karwal returned 8 record(s).

Number	Title
1	Tuning Material Properties of Oxides and Nitrides by Substrate Biasing during Plasma-Enhanced Atomic Layer Deposition on Planar and 3D Substrate Topographies
2	Plasma-Assisted ALD of Highly Conductive HfN_x: On the Effect of Energetic Ions on Film Microstructure
3	Energetic ions during plasma-enhanced atomic layer deposition and their role in tailoring material properties
4	Low resistivity HfN_x grown by plasma-assisted ALD with external rf substrate biasing
5	Low-temperature plasma-enhanced atomic layer deposition of 2-D MoS₂: large area, thickness control and tuneable morphology
6	Plasma-assisted atomic layer deposition of HfN_x: Tailoring the film properties by the plasma gas composition
7	Low-Temperature Plasma-Assisted Atomic-Layer-Deposited SnO₂ as an Electron Transport Layer in Planar Perovskite Solar Cells
8	Atomic insights into the oxygen incorporation in atomic layer deposited conductive nitrides and its mitigation by energetic ions