Max V. Shibalov Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Max V. Shibalov returned 3 record(s).

Number	Title
1	Dielectric properties investigation of a compound based on atomic layer deposited multi-layer structure
2	Multistep atomic layer deposition process for ultrathin superconducting NbN films with high critical current density on amorphous substrate
3	A Study of Ultrathin Superconducting Films of Niobium Nitride Obtained by Atomic Layer Deposition