P. A. von Hauff Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by P. A. von Hauff returned 3 record(s).

Number	Title
1	ZrO₂ on GaN metal oxide semiconductor capacitors via plasma assisted atomic layer deposition
2	High Mobility (210cm²/Vs), High Capacitance (7.2uF/cm²) ZrO₂ on GaN Metal Oxide Semiconductor Capacitor via ALD
3	Electrical Comparison of HfO₂ and ZrO₂ Gate Dielectrics on GaN