Masahiro Horita Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Masahiro Horita returned 3 record(s).

Number	Title
1	Leakage Current Reduction in ALD-Al₂O₃ Dielectric Deposited on Si by High Pressure Deuterium Oxide Annealing
2	Characterizations of Al₂O₃ gate dielectric deposited on n-GaN by plasma-assisted atomic layer deposition
3	ZnO Thin Films Fabricated by Plasma-Assisted Atomic Layer Deposition