Pieter Rowlette Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Pieter Rowlette returned 4 record(s).

Number	Title
1	Plasma-Enhanced Atomic Layer Deposition of Anatase TiO₂ Using TiCl₄
2	An Analysis of the Deposition Mechanisms involved during Self-Limiting Growth of Aluminum Oxide by Pulsed PECVD
3	Plasma-Enhanced Atomic Layer Deposition of Semiconductor Grade ZnO Using Dimethyl Zinc
4	Self-limiting deposition of semiconducting ZnO by pulsed plasma-enhanced chemical vapor deposition