Hyerin Lee Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Hyerin Lee returned 3 record(s).

Number	Title
1	Effects of an Al₂O₃ capping layer on La₂O₃ deposited by remote plasma atomic layer deposition
2	The Effects of Annealing Ambient on the Characteristics of La₂O₃ Films Deposited by RPALD
3	Effect of DC Bias on the Plasma Properties in Remote Plasma Atomic Layer Deposition and Its Application to HfO₂ Thin Films