Sven Linzen Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sven Linzen returned 3 record(s).

Number	Title
1	Wafer-level uniformity of atomic-layer-deposited niobium nitride thin films for quantum devices
2	Structural and electrical properties of ultrathin niobium nitride films grown by atomic layer deposition
3	Superconducting niobium nitride thin films deposited by metal organic plasma-enhanced atomic layer deposition