Chris Hodson Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Chris Hodson returned 8 record(s).

Number	Title
1	Innovative remote plasma source for atomic layer deposition for GaN devices
2	A comparison between remote plasma-enhanced and thermal ALD of Hafnium-nitride thin films
3	Preliminary investigation of high-k materials - TiO₂ doped Ta₂O₅ films by remote plasma ALD
4	Optimization of Plasma Enhanced Atomic Layer Deposition Processes for Oxides, Nitrides and Metals in the Oxford Instruments FlexAL Reactor
5	Plasma-enhanced atomic layer deposition and etching of high-k gadolinium oxide
6	Silicon Nitride and Silicon Oxide Thin Films by Plasma ALD
7	Deposition of TiN and HfO₂ in a commercial 200 mm remote plasma atomic layer deposition reactor
8	Plasma and Thermal ALD of Al₂O₃ in a Commercial 200mm ALD Reactor