Chia-Hsun Hsu Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Chia-Hsun Hsu returned 7 record(s).

Number	Title
1	Chemical Reaction and Ion Bombardment Effects of Plasma Radicals on Optoelectrical Properties of SnO₂ Thin Films via Atomic Layer Deposition
2	Simulation and Fabrication of HfO₂ Thin Films Passivating Si from a Numerical Computer and Remote Plasma ALD
3	Properties and Mechanism of PEALD-In₂O₃ Thin Films Prepared by Different Precursor Reaction Energy
4	Surface Passivation of Silicon Using HfO₂ Thin Films Deposited by Remote Plasma Atomic Layer Deposition System
5	Effect of plasma power on the structural properties of tin oxide prepared by plasma-enhanced atomic layer deposition
6	Influence of plasma power on deposition mechanism and structural properties of MoO_x thin films by plasma enhanced atomic layer deposition
7	Deposition and Characterization of RP-ALD SiO₂ Thin Films with Different Oxygen Plasma Powers