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Y. V. Anufriev Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Y. V. Anufriev returned 3 record(s).

NumberTitle
1Dielectric properties investigation of a compound based on atomic layer deposited multi-layer structure
2Multistep atomic layer deposition process for ultrathin superconducting NbN films with high critical current density on amorphous substrate
3A Study of Ultrathin Superconducting Films of Niobium Nitride Obtained by Atomic Layer Deposition