Hyo Jin Kim Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Hyo Jin Kim returned 4 record(s).

Number	Title
1	Electrical Properties of Ultrathin Platinum Films by Plasma-Enhanced Atomic Layer Deposition
2	Correlation of film density and wet etch rate in hydrofluoric acid of plasma enhanced atomic layer deposited silicon nitride
3	Plasma-Enhanced Atomic Layer Deposition of SiN-AlN Composites for Ultra Low Wet Etch Rates in Hydrofluoric Acid
4	Atomic layer deposition by reaction of molecular oxygen with tetrakisdimethylamido-metal precursors