Henrik Pedersen Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Henrik Pedersen returned 6 record(s).

Number	Title
1	Atomic layer deposition of InN using trimethylindium and ammonia plasma
2	Direct epitaxial nanometer-thin InN of high structural quality on 4H-SiC by atomic layer deposition
3	In Situ Activation of an Indium(III) Triazenide Precursor for Epitaxial Growth of Indium Nitride by Atomic Layer Deposition
4	Resolving Impurities in Atomic Layer Deposited Aluminum Nitride through Low Cost, High Efficiency Precursor Design
5	Epitaxial GaN using Ga(NMe2)3 and NH3 plasma by atomic layer deposition
6	The Endocyclic Carbon Substituent of Guanidinate and Amidinate Precursors Controlling Atomic Layer Deposition of InN Films